| 摘要 |
PROBLEM TO BE SOLVED: To radiate vacuum ultraviolet rays to a surface of a sample or the vicinity thereof when a charged particle beam is radiated to the sample to neutralize the charge generated by the radiation of the charged particle beam on the sample in relation to a charged particle beam device and a charged particle beam image generation method irradiating a charged particle beam to a sample for detecting a secondary electron beam emitted from the sample to generate an image. SOLUTION: This charged particle beam device is provided with a lens system for radiating an accelerated and thinly narrowed charged particle beam to a sample, image formation means for generating an image by detecting secondary electrons emitted by flatly scanning the surface of the sample with the thinly narrowed charge particle beam, a means introducing or generating an ultraviolet ray of a wavelength belonging to a vacuum ultraviolet ray area absorbed by the air in vacuum of a sample chamber, and an ultraviolet radiation means for radiating the ultraviolet ray to the surface of the sample or the vicinity thereof when the charged particle beam is radiated to the sample to neutralize the charge generated by the radiation of the charged particle beam on the sample. COPYRIGHT: (C)2007,JPO&INPIT |
