| 摘要 |
MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be controlled by adjusting the linkage between multiple fibers with weak coupling (e.g. base, tip, in-between). Driving mechanisms include base-forcing (magnetics, piezo, electrostatics) or tip forcing (magnetics). Mirrors may be formed on free ends of cantilevers to form optical scanners.
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