发明名称 METHOD FOR MAKING STRUCTURES WITH IMPROVED EDGE DEFINITION
摘要 A method includes scanning a radiation beam with respect to a multiphoton curable photoreactive composition. The radiation beam includes a power sufficient to at least partially cure a volume of the multiphoton curable photoreactive composition. The method further includes modifying a characteristic of the radiation beam as the radiation beam is scanned.
申请公布号 WO2009075970(A1) 申请公布日期 2009.06.18
申请号 WO2008US82588 申请日期 2008.11.06
申请人 3M INNOVATIVE PROPERTIES COMPANY;GATES, BRIAN J.;KRASA, ROBERT T.;MARKOWICZ, PRZEMYSLAW P.;SYKORA, CRAIG R.;DEVOE, ROBERT J.;FAKLIS, DEAN 发明人 GATES, BRIAN J.;KRASA, ROBERT T.;MARKOWICZ, PRZEMYSLAW P.;SYKORA, CRAIG R.;DEVOE, ROBERT J.;FAKLIS, DEAN
分类号 H01L21/027;G03F7/20;G03F9/00 主分类号 H01L21/027
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