发明名称 |
Laser diode array, method of manufacturing same, printer, and optical communication device |
摘要 |
A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface. |
申请公布号 |
USRE46059(E1) |
申请公布日期 |
2016.07.05 |
申请号 |
US201514605715 |
申请日期 |
2015.01.26 |
申请人 |
Sony Corporation |
发明人 |
Maeda Osamu;Shiozaki Masaki;Arakida Takahiro |
分类号 |
H01S5/187;H01S5/42;H01S5/022;H01S5/183;H01S5/02;H01S5/042 |
主分类号 |
H01S5/187 |
代理机构 |
Michael Best and Friedrich LLP |
代理人 |
Michael Best and Friedrich LLP |
主权项 |
1. A laser diode array comprising:
a support substrate including a support base, a first insulating layer, an adhesive layer, and a metal layer; a plurality of vertical resonator structures of columnar shape jointed to a surface of the metal layer, where each vertical resonator structure includes a first contact layer jointed to the metal layer, a first DBR layer, a first spacer layer, an active layer, a second spacer layer, a second DBR layer, and a second contact layer sequentially from the metal layer side; and an aperture formed in a second insulating layer configured to expose a portion of the metal layer. |
地址 |
Tokyo JP |