METHOD FOR CALCULATING PARAMETER OF PLASMA REACTOR

摘要

A method for calculating a parameter of a plasma reactor is provided to process an object with high efficiency by matching parameters of a plasma power supply with calculated electrode parameters. A plasma power supply includes a rectifier(210), an inverter(220), a controller(230), and a high voltage transformer(240). The rectifier rectifies an input AC voltage. The inverter converts the rectified voltage into an AC voltage. The controller generates a control signal for the inverter by using the AC voltage from the inverter. The high voltage transformer converts the AC voltage from the inverter to a high voltage. The inverter includes a phase-shifting type full-bridge PWM(Pulse Width Modulation) inverter. Four IGBT(Insulated Gate Bipolar Transistor) switches are driven in a zero voltage switching process at a switching frequency of 30 kHz.