| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of improving detection accuracy and reducing electric power consumption and the manufacturing cost, as well as being made smaller than conventional ones. SOLUTION: A pressure sensor 1 includes an inductor 2 formed in a flat shape. A diaphragm 3 (conductive part) is disposed so as to be opposed to the inductor 2. The diaphragm 3 is displaced upon application of pressure, and the interval between the inductor 2 and the diaphragm 3 varies according to the magnitude of the applied pressure. A capacitor 4 having a predetermined capacity and an oscillation inverter 5 are connected to the inductor 2 to form a high frequency LC oscillation circuit 10. The oscillation frequency of the high frequency LC oscillation circuit 10 is≥10 MH. COPYRIGHT: (C)2009,JPO&INPIT
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