发明名称 Self-aligned contact doping for organic field-effect transistors and method for fabricating the transistor
摘要 A method for doping electrically conductive organic compounds, fabricating organic field-effect transistors, and the transistor includes a dopant activated by radiation exposure, introduced into an electrically conductive organic compound, and exposed thereby, which triggers a chemical reaction to irreversibly fix the dopant in the organic compound. Such a transistor is significantly less expensive to fabricate than prior art organic field-effect transistors. Source and drain contacts and a gate electrode are next to one another on a substrate and a gate dielectric insulates the gate electrode. A distance, in which the organic semiconductor is applied directly to the substrate, is formed between gate dielectric and source or drain contact. Back-surface exposure enables production of doped regions in which the organic semiconductor has an increased electrical conductivity, while a low electrical conductivity of the organic semiconductor is retained in the channel region influenced by the field of the gate electrode.
申请公布号 US2005042548(A1) 申请公布日期 2005.02.24
申请号 US20030680379 申请日期 2003.10.06
申请人 KLAUK HAGEN;SCHMID GUENTER 发明人 KLAUK HAGEN;SCHMID GUENTER
分类号 H01L21/265;H01L21/336;H01L21/425;H01L29/786;H01L51/00;H01L51/05;H01L51/10;H01L51/30;H01L51/40;(IPC1-7):G03F7/00 主分类号 H01L21/265
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