| 摘要 |
PROBLEM TO BE SOLVED: To provide an approach and a device which can measure the direction and magnitude of the optical axis of an optical anisotropic membrane and thickness of the membrane with a high speed and a high precision, and furthermore capable of distribution measurement by 2-D light receiving elements. SOLUTION: The P-polarized monochromatic light is made to irradiate from a plurality of incident directions with a specific angular intervals while centering the normal line (Z) provided on the measurement point (M), the S-polarized light in the reflected light is detected corresponding to the incident directions, among the incident directions showing minimal values in the intensity of the reflection light, the azimuth direction (Φ<SB>A</SB>) of the optical axis (OX) is determined based on the incident direction (v<SB>1</SB>) in which the minimal value (V<SB>1</SB>) held between the maximal values (Λ<SB>1</SB>) and (Λ<SB>2</SB>), and the polar angle direction (θ) is determined based on the incident direction in which the minimal value (V<SB>3</SB>) held between maximal (Λ<SB>1</SB>) of maximum peak and its adjacent maximal (Λ<SB>3</SB>) of medium peak is measured. COPYRIGHT: (C)2006,JPO&NCIPI
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