Ionization gauge with operational parameters and geometry designed for high pressure operation

摘要

An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

主权项

1. An ionization gauge to measure pressure comprising:
an anode enclosing a volume; an electron source that generates electrons outside of the anode; an inside ion collector electrode, located inside of the anode, that collects ions formed by the impact between the electrons and gas molecules and atoms inside the anode; and an outside ion collector electrode, located outside of the anode, that collects ions formed by the impact between the electrons and gas molecules and atoms outside the anode, the outside ion collector electrode being closer than the inside ion collector electrode to the electron source, to collect ions at pressures above about 10−4 Torr.