| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of microlenses provided on a solid state image sensor so that a high focusing performance is given by narrowing the gap to an adjoining microlens, and each microlens has a uniform shape.SOLUTION: The manufacturing method of microlenses 7 in a solid state image sensor 10 comprises a step for providing a first layer 81 composing the microlenses, laminating a second layer 85 composing the microlenses on the first layer in a shape different from that of the first layer, and forming the microlenses of desired shape by integrating both layers by heat treatment. The first layer has a shape including a radial pattern from the center of each pixel toward the pixel boundary, and the second layer has a shape close to the polygonal shape of each pixel in a convex figure pattern not exceeding the pixel boundary. |
