Aus Bis (Tertiärbutylamino) Silan erhaltenes Siliziumnitrid,申请号DE19986034609T-传众专利搜索

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发明名称	Aus Bis (Tertiärbutylamino) Silan erhaltenes Siliziumnitrid
摘要
申请公布号	DE69834609(T2)	申请公布日期	2007.05.03
申请号	DE19986034609T	申请日期	1998.09.30
申请人	AIR PRODUCTS AND CHEMICALS INC.	发明人	LAXMAN, RAVI KUMAR;ROBERTS, DAVID ALLEN;HOCHBERG, ARTHUR KENNETH;HOCKENHULL, HERMAN GENE;KAMINSKY, FELICIA DIANE
分类号	C07F7/02;C23C16/34;H01L21/318	主分类号	C07F7/02
代理机构		代理人
主权项
地址

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