| 摘要 |
A micro-distance measuring method includes: collecting measurement light projected from a light projection part by lens, inversely correcting astigmatism of the measurement light by a correction optical part, making the measurement light incident on a translucent substrate at an oblique angle so that the astigmatism of the measurement light inversely corrected by the correction optical part is canceled, projecting the measurement light, passing through the translucent substrate, on an object adjacent to the translucent substrate, and receiving light reflected on the object, detecting a phase difference between polarized components of the received light, which are different in the vibration direction, and determining a distance between the substrate and the object on the basis of the detected phased difference.
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