VOLTAGE TUNED DIELECTRIC VARACTORS WITH BOTTOM ELECTRODES

摘要

A voltage tunable dielectric varactor includes a substrate having a first dielectric constant and having generally a planar surface, first and second electrodes positioned on the generally planar surface of the substrate, the first and second electrodes being separated to form a first gap therebetween; a tunable dielectric layer positioned on the first and second electrodes and in the first gap, the tunable dielectric layer having a second dielectric constant greater than the first dielectric constant; and third and fourth electrodes positioned on a surface of the tunable dielectric layer opposite the first and second electrodes, the third and fourth electrodes being separated to form a second gap therebetween.