| 摘要 |
A low magnification liquid immersion objective lens system for use in a form observing apparatus, measuring apparatus and the like which uses an immersion liquid having a refractive index for the d-line within a range defined by a condition (1) shown below, and has a magnification beta and a working distance WQDL which satisfy the following conditions (2) and (3): <paragraph lvl="0"><in-line-formula>1.34<=ND<=1.80 (1) </in-line-formula><paragraph lvl="0"><in-line-formula>beta<=15 (2) </in-line-formula><paragraph lvl="0"><in-line-formula>WDL<=0.35 mm (3)</in-line-formula>
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