发明名称 SUBSTRATE SUPPORTING APPARATUS
摘要 A substrate supporting device for supporting a substrate is disclosed. In the substrate supporting device according to the present invention, first to third arms are mechanically connected to each other. The second and third arms are rotated by the rotation of the first arm. The present invention has simple structure, so it can reduce production costs. The first and third arms are formed of a bar having a narrow width. When the first and second arms rotate backward, the first and second arms are positioned inside a support plate and the third arm is overlapped with the first and second arms. Accordingly, the arms are completely positioned inside the support plate. Thus, other processes are not affected by the arms to be convenient.
申请公布号 KR20140027777(A) 申请公布日期 2014.03.07
申请号 KR20120093788 申请日期 2012.08.27
申请人 TES CO., LTD. 发明人 CHOI, EUN JAE;LEE, CHANG SEONG
分类号 H01L21/683;G02F1/13 主分类号 H01L21/683
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