| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing method and a vacuum processing device, capable of suppressing temperature rise of a base material, without complicating the processing device.SOLUTION: The vacuum processing method of the present invention that performs processing of a base material S in a vacuum includes: a step for providing a vacuum processing device 1 having a vacuum chamber 2, a base material holder 3 attached inside the vacuum chamber 2, and a latent heat storage body 4 which is accommodated inside the base holder 3 and absorbs heat received by the base material S during processing due to phase change from solid to liquid, the latent heat storage body 4 being in a solid state; and a processing step for absorbing heat received by the base material S during processing due to phase change of the latent heat storage body 4 from solid to liquid while performing processing of the base material S in the vacuum, in a state that the base material S is held by the base material holder 3.SELECTED DRAWING: Figure 1 |
