发明名称 |
Laser-based method for growing array of carbon nanotubes |
摘要 |
A method for growing an array of carbon nanotubes includes the steps of: (a) providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface; (b) forming a catalyst film on the first substrate surface; (c) flowing a mixture of a carrier gas and a first carbon source gas over the catalyst film on the first substrate surface; (d) focusing a laser beam on the second substrate surface to locally heat the substrate to a predetermined reaction temperature; and (e) growing an array of the carbon nanotubes on the first substrate surface via the catalyst film.
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申请公布号 |
US2008220182(A1) |
申请公布日期 |
2008.09.11 |
申请号 |
US20070982667 |
申请日期 |
2007.11.02 |
申请人 |
TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
CHEN ZHUO;LUO CHUN-XIANG;JIANG KAI-LI JIANG;FAN SHOU-SHAN |
分类号 |
C23C16/44 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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