| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low-cost position detection system for linear motor suitable for high-speed operation for linear motor systems designed for long-distance transportation, used in semiconductor processing equipment or the like. <P>SOLUTION: A linear motor M is provided on the stator side with a scale 3 and on the moving member side with a detection unit 4. Position information acquired by the detection unit 4 is converted into serial data, which is in turn transmitted to the stator side by half-duplex optical communication. A plurality of optical transmitter/receiver units 71 to 74 are provided on the stator side. The liner motor has a signal selection unit 9 that selects the reception signal highest in signal intensity from among a plurality of the reception signals received by the optical transmitter/receiver units 71 to 74. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
