| 摘要 |
PROBLEM TO BE SOLVED: To provide vertical illumination or transmitted illumination spherical surface inspection device that implements an appearance inspection of an entire surface or part of an inspected surface of an inspected member including a surface with a spherical or aspherical surface with a wide field of view and high accuracy.SOLUTION: A vertical illumination spherical surface inspection device has: an image observation unit 90c that includes an objective lens 3 creating a primary image of an inspected surface 1b of an inspected member 1 as a telecentric real image or virtual image, an objective lens support base 90b, a set having an image relay lens 4 and image formation lens 5 relaying the primary image to be created by the objective lens, and creating a secondary image, and an image pick-up element 6 attached at a secondary image formation position and moves along an inspection optical axis; and a vertical illumination projection unit 90d that, due to an arrangement of a light splitting deflection mirror 7, allows a light flux from a circular light source 11 arranged on a projection light optical axis 21 to be formed at a focus position of the objective lens as a circular light source image. A size of the circular light source or a numerical aperture illuminating the inspected member, that is, an illumination NA is variable.SELECTED DRAWING: Figure 1 |
