发明名称 |
Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming thereof and design structures |
摘要 |
Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming for MEMS capacitor devices, and design structures are disclosed. The method includes identifying a process variation related to a formation of micro-electro-mechanical structure (MEMS) capacitor devices across a substrate. The method further includes providing design offsets or process offsets in electrode areas of the MEMS capacitor devices across the substrate, based on the identified process variation. |
申请公布号 |
US8739096(B2) |
申请公布日期 |
2014.05.27 |
申请号 |
US201113326409 |
申请日期 |
2011.12.15 |
申请人 |
JAHNES CHRISTOPHER V.;STAMPER ANTHONY K.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
JAHNES CHRISTOPHER V.;STAMPER ANTHONY K. |
分类号 |
G06F17/50;H01L29/02 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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