| 摘要 |
PROBLEM TO BE SOLVED: To provide an ammonia recover and reuse method by liquefying ammonia contained in an exhaust gas containing ammonia, hydrogen, and nitrogen discharged from a process of manufacturing a gallium nitride based compound semiconductor and separating the ammonia from hydrogen and nitrogen by performing a pressurization process and a cooling process on the exhaust gas, and reusing the recovered ammonia, while preventing accumulation of water in a device for recovering and reusing the ammonia and suppressing increase in moisture concentration in the ammonia supplied for reuse.SOLUTION: A moisture content contained in the exhaust gas is removed by moisture content removing means 12 prior to a cooling process 13. When a condenser or an absorbent is used as the moisture content removing means, the moisture content contained in the exhaust gas should preferably be removed by the moisture content removing means prior to a pressurization process 11. |
