发明名称 METHOD FOR TESTING SIGNAL-TO-NOISE RATIO USING A FILM FRAME
摘要 A system and a method are provided for testing a MEMS microphone during manufacture by using a film to obstruct the acoustic ports of the microphone. The microphone testing is performed while the microphones are still in an array and mounted on a film frame. By performing the testing while the acoustic ports of the microphone are covered with film, unwanted, external noise is attenuated.
申请公布号 US2016183021(A1) 申请公布日期 2016.06.23
申请号 US201414580453 申请日期 2014.12.23
申请人 Robert Bosch GmbH 发明人 Doller Andrew J.;Pravlik David
分类号 H04R29/00 主分类号 H04R29/00
代理机构 代理人
主权项 1. A method for noise testing a micro-electro-mechanical system (MEMS) microphone, the method comprising: positioning a film frame in a testing apparatus, the film frame including a film adhered to an array of MEMS microphones and covering an acoustic port of each MEMS microphone in the array of MEMS microphones; connecting an alignment socket to a substrate of the MEMS microphones, the alignment socket coupling to one or more contact pads of each MEMS microphone in the array of MEMS microphones to provide a power connection and a MEMS microphone output connection to each MEMS microphone; measuring, at a control unit, an output signal from the MEMS microphone output connection to obtain noise performance data; and recording the noise performance data in memory.
地址 Stuttgart DE