发明名称 |
METHOD FOR TESTING SIGNAL-TO-NOISE RATIO USING A FILM FRAME |
摘要 |
A system and a method are provided for testing a MEMS microphone during manufacture by using a film to obstruct the acoustic ports of the microphone. The microphone testing is performed while the microphones are still in an array and mounted on a film frame. By performing the testing while the acoustic ports of the microphone are covered with film, unwanted, external noise is attenuated. |
申请公布号 |
US2016183021(A1) |
申请公布日期 |
2016.06.23 |
申请号 |
US201414580453 |
申请日期 |
2014.12.23 |
申请人 |
Robert Bosch GmbH |
发明人 |
Doller Andrew J.;Pravlik David |
分类号 |
H04R29/00 |
主分类号 |
H04R29/00 |
代理机构 |
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代理人 |
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主权项 |
1. A method for noise testing a micro-electro-mechanical system (MEMS) microphone, the method comprising:
positioning a film frame in a testing apparatus, the film frame including a film adhered to an array of MEMS microphones and covering an acoustic port of each MEMS microphone in the array of MEMS microphones; connecting an alignment socket to a substrate of the MEMS microphones, the alignment socket coupling to one or more contact pads of each MEMS microphone in the array of MEMS microphones to provide a power connection and a MEMS microphone output connection to each MEMS microphone; measuring, at a control unit, an output signal from the MEMS microphone output connection to obtain noise performance data; and recording the noise performance data in memory. |
地址 |
Stuttgart DE |