| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer cassette having a reduced weight with maintained necessary rigidity.SOLUTION: A wafer cassette (4) for housing a plurality of sheets of wafers (W) or a plurality of annular frames (F) having wafers integrated by adhering to an adhesive tape (T) includes: mutually opposite side parts (41a, 41b); a ceiling part (43) fixed to an upper ends of the side parts; bottom parts (44a, 44b) fixed to a lower ends of the side parts; an opening part (O) for inserting/extracting the wafers or the annular frames; and a back stop part (45) for supporting the wafers or the annular frames at the back part. Each side part is formed of a composite plate (411) having a resin plate (411a) sandwiched by thin metal plates (411b). In the internal wall of the composite plate, housing shelves (42a, 42b) are disposed to house the wafers or the annular frames. |
