| 摘要 |
PROBLEM TO BE SOLVED: To easily regulate various in-plane wavelength distributions on an optical multilayer film. SOLUTION: Either the 1st temperature or a 2nd temperature, that is different from the 1st temperature is set to a temperature which generates irreversible wavelength shifts in the wavelength characteristics of an optical multilayer film. By raising the average temperature of the contact area 71a of the optical multilayer film 71 formed on the glass substrate 72 through a temperature transmission section 110 with a temperature monitor up to the 1st temperature, and the average temperature of the non-contact area of the optical multilayer film 71 up to the 2nd temperature by the fiducial temperature applying section 120, the wavelength shifts are made, in the amounts different between these areas. COPYRIGHT: (C)2007,JPO&INPIT
|
