发明名称 半導体素子搭載用基板
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor element mounting substrate which includes a terminal part having good bonding characteristics and has high mass productivity at low cost.SOLUTION: A semiconductor element mounting substrate comprises: a terminal part for performing wire bonding by Cu-based bonding wires; and plating layers which are formed on an end of the terminal part and include an NiP alloy plating layer, an Ni plating layer, a Pd plating layer or a Pd alloy plating layer, and a noble metal plating layer including at least one layer from an Au plating layer, an Ag plating layer, an Au alloy plating layer, and an Ag alloy plating layer or an AuAg alloy plating layer in this order from the terminal part side.
申请公布号 JP6057285(B2) 申请公布日期 2017.01.11
申请号 JP20120237087 申请日期 2012.10.26
申请人 SHマテリアル株式会社 发明人 菱木 薫
分类号 H01L23/50;H01L23/12;H01L23/48 主分类号 H01L23/50
代理机构 代理人
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