| 发明名称 |
GLASS CERAMIC FOR ULTRAVIOLET LITHOGRAPHY AND METHOD OF MANUFACTURING THEREOF |
| 摘要 |
An extreme ultraviolet mask and method of manufacture thereof includes: providing a glass-ceramic block; forming a glass-ceramic substrate from the glass-ceramic block; and depositing a planarization layer on the glass-ceramic substrate. |
| 申请公布号 |
SG11201604722W(A) |
申请公布日期 |
2016.07.28 |
| 申请号 |
SG11201604722W |
申请日期 |
2014.12.19 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
HOFMANN, RALF;FOAD, MAJEED A.;BEASLEY, CARA |
| 分类号 |
C03C17/00;C03C17/22 |
主分类号 |
C03C17/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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