发明名称 |
METHODS OF MANUFACTURING A MAGNETIC FIELD SENSOR |
摘要 |
A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane. |
申请公布号 |
US2016260895(A1) |
申请公布日期 |
2016.09.08 |
申请号 |
US201615145515 |
申请日期 |
2016.05.03 |
申请人 |
EVERSPIN TECHNOLOGIES, INC. |
发明人 |
WHIG Renu;MATHER Phillip;SMITH Kenneth;AGGARWAL Sanjeev;SLAUGHTER Jon;RIZZO Nicholas |
分类号 |
H01L43/12;G01R33/09;H01L27/22;H01L43/08;H01L43/02 |
主分类号 |
H01L43/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Chandler AZ US |