| 摘要 |
PROBLEM TO BE SOLVED: To provide a free movement mechanism and a free movement system for tables, which can improve rigidity in a movement direction for a table. SOLUTION: A XYθstage 1 is provided with three table movement mechanisms 11, 12 and 14, and a table movement restraint mechanism 13. The table movement mechanism 11 and the table movement restraint mechanism 13 are opposite and both axial directions are parallel to each other, and the table movement mechanisms 12 and 14 are opposite and both axial directions are parallel to each other. The axial direction of the table movement mechanism 11 and the table movement restraint mechanism 13 and the axis direction of the table movement mechanisms 12 and 14 are orthogonal to each other. COPYRIGHT: (C)2005,JPO&NCIPI
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