发明名称 X-RAY SOURCE, X-RAY APPARATUS AND METHOD FOR PRODUCING STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a technique for radiating heat generated in an aperture unit of an X-ray source for an X-ray apparatus.SOLUTION: An X-ray source includes: a conductor member 15A disposed between an electron source and a target 14 and focusing electrons on a predetermined position while accelerating the electrons; and an aperture unit 16 including an aperture part 16a restricting a part of the electrons focused by the conductor member 15A. The aperture unit 16 has an extension part which extends toward an outside along a second direction crossing a first direction in which the electrons are directed toward the target 14, and is brought into contact with a housing 27.
申请公布号 JP2014212011(A) 申请公布日期 2014.11.13
申请号 JP20130087283 申请日期 2013.04.18
申请人 NIKON CORP 发明人 HAKODA FUMIHIKO
分类号 H01J35/14;H01J35/00;H01J35/16 主分类号 H01J35/14
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