发明名称 A DRAIN POCKET OF THE EXHAUST PIPE FOR SEMICONDUCTOR PRODUCTION EQUIPMENT
摘要 Provided is a drain pocket of an exhaust pipe for semiconductor production equipment, which collects condensate water or sludge contained in exhaust gas passing the exhaust pipe and is configured to easily discharge the collected condensate water and sludge, not making the same remain inside the exhaust pipe, thereby reliably processing the condensate water or sludge contained in the exhaust gas. The drain pocket of an exhaust pipe includes a joint pipe that is connected to the exhaust pipe configured to discharge exhaust gas produced in a semiconductor manufacturing process to the outside, and a cover that is coupled to the joint part to seal a lower part part of the joint pipe and has an outlet connected to a drain pipe in a lower part. A part of the cover between a part coupled to the joint pipe and a part where the outlet exists is formed into an inclined side descending toward the outlet, thus allows the collected matter collected via the joint pipe to fall free and be discharged through the outlet.
申请公布号 KR101643139(B1) 申请公布日期 2016.07.27
申请号 KR20150187945 申请日期 2015.12.28
申请人 WOO JIN I & S CO., LTD. 发明人 KONG, HAE WON
分类号 H01L21/02;F16L23/00;F16L55/07 主分类号 H01L21/02
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