摘要 |
Provided are a method for manufacturing a graphene grown on a substrate, a graphene grown on a substrate, and an electronic part comprising the same. The method for manufacturing a graphene grown on a substrate comprises the following steps of: (1) arranging a catalyst-free layer on a substrate; (2) providing an etching gas and a carbon-containing gas, and conducting atmospheric pressure chemical vapor deposition, (APCVD); (3) supplying an etching gas for the catalyst-free layer when supplying the carbon-containing gas, and growing a graphene on the catalyst-free layer; and (4) continuously conducting APCVD from the process of the step (3), and growing the graphene on the substrate without the catalyst-free layer by continuously removing all of the catalyst-free layer by the etching gas. |