发明名称 絶縁膜
摘要 Polyimide or a precursor thereof expressed by Chemical Formula 1 or 2 and a photosensitive organic insulator composition having the same are disclosed. The polyimide or the precursor thereof is prepared from diamine including polyalkyleneoxide. The use of the photosensitive organic insulator composition can allow for low temperature curing and shorten a curing time, form a low taper angle, and implement a high sensitivity and high residual film. Also, since the photosensitive organic insulator composition, as a positive photosensitive composition, has excellent solubility with respect to an alkali solution of an exposed portion, the generation of impurity can be minimized.
申请公布号 JP5649242(B2) 申请公布日期 2015.01.07
申请号 JP20120556967 申请日期 2011.03.07
申请人 エルジー ケム. エルティーディ. 发明人 キム、サン ウー;アン、キョウン ホー;キム、キュン ジュン;シン、セ ジン;ジョン、ヘ ウォン;パク、チャン ヒョ;ジョ、ジュン ホー;キム、ユ ナ
分类号 G03F7/023;C08G73/10;G02F1/1333;G03F7/004;H01L21/027;H01L51/50;H05B33/22 主分类号 G03F7/023
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