ANALYZING TOOL WITH EXHAUST PORT

摘要

An analyzing tool (X1), wherein a flow passage (4) for moving specimen (B) along a specified direction is set on a substrate (1), the flow passage (4) has a specified dimension in the lateral direction orthogonal to the specified direction as viewed in the plate thickness direction of the substrate, and an exhaust port (31) for exhausting gas in the flow passage (4) is provided in the flow passage (4). A linear portion extending in the lateral direction or in the generally lateral direction is provided at the edge (31a) of the exhaust port (31) positioned on the upstream side of the specimen (B) in the moving direction. The flow passage (4) is formed so that, for example, the moving speed of the specimen (B) moving through the lateral center portion is higher than that through the other portions.