HUMIDITY SENSOR

摘要

A humidity sensor capable of reliable operation in an corrosive ambient for a long time, which ensures reliable electrical conduction between its upper electrode and signal detection leads. A lower electrode, a humidity-sensitive polymer film and a porous upper electrode are formed one over another on a insulatiing substrate. One lead is connected to the lower electrode with conductive adhesive. Puds, preferably of Pt, Pd or Au, are formed at least on the upper electrode. The other lead is connected to the pad with conductive adhesive.