| 摘要 |
PROBLEM TO BE SOLVED: To reduce a manufacturing cost by reducing the number of manufacturing steps when depositing a carbon film on a titanium substrate having a titanium oxide layer on its surface by CVD (chemical vapor deposition).SOLUTION: A method of manufacturing a fuel cell separator deposits a carbon film 50 on a titanium substrate 41 having a titanium oxide layer 41a on its surface by CVD. The method includes: a step of bringing the periphery of the titanium substrate 41 having the titanium oxide layer 41a on its surface into a vacuum atmosphere; an irradiation step of irradiating a surface of the titanium oxide layer 41a of the titanium substrate 41 with light having a wavelength of 390 nm or less before or during deposition of the carbon film 50; and a step of depositing the carbon film 50 on the light irradiation surface of the titanium oxide layer 41a irradiated with the light in the irradiation step.SELECTED DRAWING: Figure 2 |
