发明名称 VAPOR DEPOSITION MASK MOUNTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an automatic vapor deposition mask mounting device capable of sequentially forming an organic thin film used during the manufacture of an organic light emitting diode on the surface of a substrate, simple in the structure of the device used for the formation of a high definition vapor deposition pattern and without requiring additional power.SOLUTION: A vapor deposition mask mounting device for mounting a mask having substrates aligned during the vapor deposition step comprises: a base 110 having a mask mounted at a mounting position on the upper surface; and a mounting part 120 set to the base and having a stably mounting surface for stably mounting the lower surface of the mask and a pressing surface for pressing the side surface of the mask. The mounting part 120 transfers the mask to the mounting position by pressing the mask on the pressing surface coupled with a safely mounting member descended when the mask is stably mounted to mount the mask. Whereby, the structure of the device is simple, and the mask is automatically mounted at a mounting position when the mask is safely mounted on the safely mounting member without requiring additional power.SELECTED DRAWING: Figure 3
申请公布号 JP2016084537(A) 申请公布日期 2016.05.19
申请号 JP20150209657 申请日期 2015.10.26
申请人 SNU PRECISION CO LTD 发明人 KIM YOUNG-HO;LEE JAE JIN;PARK HEUI JAE
分类号 C23C14/04;C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/04
代理机构 代理人
主权项
地址