发明名称 |
METHOD OF FORMING A MICROMACHINED DEVICE USING AN ASSISTED RELEASE |
摘要 |
A method of forming a micromachined device embeds a first material within a sacrificial material, and then removes such first material to form a channel through the sacrificial material. The method then directs a sacrificial material removal fluid through the channel. The sacrificial material removal fluid removes at least a portion of the sacrificial material. |
申请公布号 |
WO2008024528(A2) |
申请公布日期 |
2008.02.28 |
申请号 |
WO2007US63197 |
申请日期 |
2007.03.02 |
申请人 |
ANALOG DEVICES, INC.;WACHTMANN, BRUCE, K. |
发明人 |
WACHTMANN, BRUCE, K. |
分类号 |
B81C1/00 |
主分类号 |
B81C1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|