Analyzing system for blazed phase grating sample image has processor that converts image data to intensity values by pixel and determines best focus by azimuth such that parameters can be calculated from a blazed phase grating sample

摘要

A processor loads the images from a memory to convert image data for each sample point to intensity values by pixel and determine the best focus by azimuth for each sample point based on the intensity values such that parameters can be calculated from a blazed phase grating sample. A memory stores the mages individually named according to a sequential naming protocol. Independent claims are included for the following: (1) an image inspection system; (2) an optical lithography and inspection system; (3) a sample parameter calculating system; (4) an exposure tool parameter determining method; (5) a sample parameter extracting method; and (6) a sample parameter analyzing method.