CRYSTAL VIBRATION ELEMENT AND METHOD OF MANUFACTURING THE SAME, AND INTERMEDIATE PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide a vibration element and the like, which can solve various problems caused by a slit, even when an electrode is formed by a lift-off technology.SOLUTION: A vibration element 10 includes: a base 11; two vibration arm parts 12a and 12b which are extended in the same direction from the base 11; excitation electrodes 22a and 22b which are formed in the vibration arm parts 12a and 12b; and an electrode separation surface 14 which is made of a crystal break-off surface or an etched surface formed on a base 11 between the vibration arm parts 12a and 12b and which electrically separates the excitation electrodes 22a and 22b.SELECTED DRAWING: Figure 1