LIFT PIN SUPPORTING UNIT TO CONTROL GENERATION OF PARTICLES CAUSED BY REPEATED CONTACT OF LIFT PIN

摘要

PURPOSE: A lift pin supporting unit is provided to control the generation of particles caused by repeated contact of a lift pin by forming an upper cover made of the same material as the lift pin such that the upper cover directly comes in contact with the lift pin. CONSTITUTION: A lift pin supporting unit(144) supports a lift pin(140) that moves up/down through a plurality of lift pin holes(142) formed on the side surface of a susceptor(122) placed in a process chamber(110). An upper cover periodically comes in contact with the lift pin as the lift pin moves up/down. A lower base is made of a different material than that of the upper cover, coupled to the lower part of the process chamber.