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发明名称
Elektromagnetische Justiervorrichtung
摘要
申请公布号
DE69428617(D1)
申请公布日期
2001.11.22
申请号
DE19946028617
申请日期
1994.01.24
申请人
SVG LITHOGRAPHY SYSTEMS, INC.
发明人
GALBURT, DANIEL N.;O'CONNOR, GEOFFREY
分类号
B23Q1/00;B23Q1/62;B23Q5/28;B23Q5/52;B25J9/16;G03F7/20;H01L21/027;H01L21/68;(IPC1-7):H01L21/00
主分类号
B23Q1/00
代理机构
代理人
主权项
地址
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