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经营范围
发明名称
Excimer laser with pulse and beam multiplier
摘要
申请公布号
EP0984531(A3)
申请公布日期
2002.09.25
申请号
EP19990117280
申请日期
1999.09.02
申请人
CYMER, INC.
发明人
MORTON, RICHARD G.
分类号
H01S3/225;H01S3/00;H01S3/10;(IPC1-7):H01S3/00
主分类号
H01S3/225
代理机构
代理人
主权项
地址
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