| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a carbon dioxide snow jetting apparatus for washing washed matters such as a piezoelectric vibrator and optical parts using carbon dioxide gas snow and a mask and a tray carrying the piezoelectric vibrator and the optical parts, and a carbon dioxide gas snow jetting apparatus jetting the carbon dioxide gas snow to jetted matters. <P>SOLUTION: This carbon dioxide gas snow jetting device for washing the washed matter by using the carbon dioxide gas snow comprises an assist gas source, a control device part regulating the flow and temperature of the gas jetted from the carbon dioxide gas source for each injection nozzle, and a plurality of injection nozzles connected to the control device part through at least two flexibly moving tubes and to jetting an assist gas and the carbon dioxide gas snow to the washed matter. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
