High density plasma forming device,申请号EP20000302875-传众专利搜索

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发明名称	High density plasma forming device
摘要
申请公布号	EP1143481(B1)	申请公布日期	2005.07.06
申请号	EP20000302875	申请日期	2000.04.05
申请人	PLASMA QUEST LIMITED	发明人	THWAITES, MICHAEL JOHN
分类号	H01J37/32;H01J37/34;(IPC1-7):H01J37/32	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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