| 摘要 |
PROBLEM TO BE SOLVED: To provide a cooling apparatus whereby color filters can be produced in good yield.SOLUTION: This invention provides a cooling apparatus 10 for cooling a material 3 for a color filter in which a resist material including a sublimable material is applied on a substrate, wherein the cooling apparatus 10 includes a tray 1 for placing the color filter material 3 thereon, and an air outlet 5 for discharging the sublimable material, and a portion covered with a resin 20 exists above the tray 1. |
