METAL OXIDE GAS SENSOR ARRAY DEVICES, SYSTEMS, AND ASSOCIATED METHODS

摘要

Sensor devices and systems for detecting an analyte are disclosed and described. In one embodiment, a transducer array operable to detect a plurality of analytes is provided. Such an array may include a support substrate and a plurality of Metal Oxide Semiconductor (MOS) sensors coupled to the substrate. Each MOS sensor can further include a MOS active material, a plurality of heating elements thermally coupled to the MOS active materials in a position and orientation that facilitates heating of the MOS active materials, and an electrode functionally coupled to the MOS active material and operable to detect a response signal generated by the MOS active material.

主权项

1. A transducer array operable to detect a plurality of analytes, comprising:
a support substrate; a plurality of Metal Oxide Semiconductor (MOS) sensors coupled to the substrate, each MOS sensor further comprising a MOS active material; a plurality of heating elements thermally coupled to the MOS active materials of the plurality of MOS sensors in a position and orientation that facilitates heating of the MOS active materials; and an electrode functionally coupled to the MOS active material and operable to detect a response signal from the MOS active material.