发明名称 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a positioning device that virtually determines the position of first and second movable objects in a common operating zone. <P>SOLUTION: A positioning device comprises a first coil assembly arranged next to the operating zone, a second coil assembly arranged on the opposite side of the operating zone, one or more first magnets arranged on the first movable object that work together with the first coil assembly, and one or more second magnets arranged on the second movable object that work together with the second coil assembly. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008091892(A) 申请公布日期 2008.04.17
申请号 JP20070228805 申请日期 2007.09.04
申请人 ASML NETHERLANDS BV 发明人 BUTLER HANS;KLAASSEN FRANCISCUS ADRIANUS GERARDUS
分类号 H01L21/027;G03F7/20;H01L21/68 主分类号 H01L21/027
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