APPARATUS FOR WET TREATMENT OF PLATE-LIKE ARTICLES

摘要

Disclosed is an apparatus for wet treatment of a plate-like article, which comprises: - a spin chuck for holding and rotating the plate-like article comprising means for holding the plate-like article at the plate-like article's edge and a gas supply means for directing gas towards the side of the plate-like article, which faces the spin chuck, wherein the gas supply means comprises a gas nozzle rotating with the spin chuck, for providing a gas cushion between the plate-like article and the spin chuck; - a fluid supply means for directing fluid onto the side of the plate-like article, which is facing the spin chuck, through a non-rotatable fluid nozzle.