ANODIZED SUBSTRATE SUPPORT

摘要

PROBLEM TO BE SOLVED: To provide a substrate support which reduces defects and enhances the uniformity of a thin film deposited on a substrate and a method for fabricating the same. SOLUTION: The substrate support 200 includes electrically conductive body 202 having a substrate support surface 204 that is covered by an electrically insulative coating film 210. At least a portion of the coating film 210 centered on the substrate support surface 204 has a surface finish of between about 80 to about 200 micro-inches. In another embodiment, the substrate support 200 includes an anodized aluminum body 202 having a surface-finish 216 of between about 80 to about 200 micro-inches on a portion of the body 202 adapted to support a substrate 140 thereon. COPYRIGHT: (C)2005,JPO&NCIPI