| 摘要 |
<p>It has been difficult to achieve highly accurate alignment when a plurality of lenses and DOEs are used. Provided are a fine structure body having a fine structure inside and a method for manufacturing such fine structure body. The method is composed of a step of forming a first pattern on a surface of a first layer; a step of forming a sacrificial layer on the surface of the first layer, with a part of the first layer exposed; a step of forming a second pattern on a surface of the sacrificial layer; a step of forming a second layer on a part of the surfaces of the sacrificial layer and the first layer; and a step of removing a member constituting the sacrificial layer. In the step of forming the first pattern on the first layer and the step of forming the second pattern on the sacrificial layer, a pattern is formed by having the same alignment marks as references, respectively. Thus, highly accurate alignment is achieved.</p> |
